采用先進(jìn)的常規(guī)自檢功能并配有獨(dú)立的診斷維護(hù)端口，因此用戶無(wú)需拆除 MFC 即可進(jìn)行故障排除或流量條件切換
得益于基于國(guó)際標(biāo)準(zhǔn)的高級(jí)計(jì)量系統(tǒng)和校準(zhǔn)技術(shù)，產(chǎn)品擁有出色的測(cè)量精度
產(chǎn)品類(lèi)型Mass Flow Controller
區(qū)別
NEMA 4X/IP66 Approved Enclosure
Perfect for Hose Down/Wash Down Applications
Hazardous Area Approvals
性能
流量范圍-滿量程容量.003 - 2500 slpm
精度
17025 Certified Devices (Includes linearity, excludes calibration system measurement uncertainty, per SEMI E69)
±0.6% of SP (20-100% FS)
±0.12% of FS (<20% FS)
1100 slpm up to 2500 slpm: ±0.6% of FS
Standard Devices (includes uncertainty from reference standards
±0.9% of SP (20-100% FS)
±0.18% of FS (2-20% FS)
1100 slpm up to 2500 slpm: ±1.0% of FS
重復(fù)性
0.20% SP
線性
Included in Accuracy
響應(yīng)時(shí)間-常閉
<1 second up to 100 lpm
<3 seconds up to 2500 lpm
多氣體多量程
Standard
最大壓力
Up to 100 lpm: 1500 psi/100 bar
Up to 50 lpm: 4500psi/310 bar (optional)
100-2500 lpm: 1000 psi/70 bar
控制范圍
1-50 slpm: 100:1 Turndown for F.S.
50-2500 lpm: 50:1 Turndown for F.S.
零點(diǎn)穩(wěn)定性
< 0.2% F.S. per year
溫度系數(shù)
Zero: <0.05% of F.S. per °C
Span: < 0.1% of S.P. per °C
壓力系數(shù)
±0.03% per psi (0-200 psi N2)
靈敏度
<0.2% F.S. maximum deviation from specified accuracy after re-zeroing
等級(jí)
最大溫度65oC
壓差范圍
Controllers
Up to 50 lpm: 5 psi/0.35 bar min - 1500 psi/103.4 bar max
50-100 lpm: 10 psi/0.69 bar min - 50 psi/3.45 bar max
500 lpm: 7.5 psi/0.52 bar min - 300 psi/20.0 bar max
1000 lpm: 14.5 psi/1.00 bar min - 300 psi/20.0 bar max
2500 lpm: 35.0 psi/2.41 bar min - 300 psi/20.0 bar max
漏率1x10-9 atm cc/sec He
機(jī)械
密封材料Elastomer Seal
接液材料
316L Stainless Steel
High Alloy Stainless Steel
Viton® Fluoroelastomers
Buna-N
Kalrez®
Teflon®/Kalrez®
EPDM
閥門(mén)
Normally Closed
Normally Open
Meter (no valve)
診斷
診斷能力Available
狀態(tài)燈
MFC Health, Network Status
報(bào)警
Sensor Output
Control Valve Output
Over Temperature
Power Surge/Sag
Network Interruption
診斷/服務(wù)端口
RS485 via 2.5mm jack
電氣
模擬通訊0-5 V, 1-5 V, 0-10 V, 0-20 mA, 4-20 mA
數(shù)字通訊DeviceNet™
EtherNet/IP™
FOUNDATIONTM Fieldbus
Profibus®
PROFINET
RS-485
電氣連接
DeviceNet™: 1 x M12 with threaded coupling nut (B)
Profibus®: 1 x 15-pin Male Sub-D
1 x 9-pin female Sub-D
RS485: 1 x 15-pin Male Sub-D, (A)
電源-功耗
Analog / Profibus® / RS-485
Valve Orifice > 0.032": 8 Watts
Valve Orifice ≤ 0.032": 5 Watts
Without Valve: 2 Watts
DeviceNet™
Valve Orifice > 0.032": 10 Watts
Valve Orifice ≤ 0.032": 7 Watts
Without Valve: 4 Watts
承諾
認(rèn)證和批準(zhǔn)
ISO/IEC 17025:2005
CE: EMC, RoHs, PED
UL Listed/Recognized:
Class 1, Div 2, Group A,B,C,D
Class 1, Zone 2, IIC T4, Class II, Zone 22
ATEX:
II 3 G Ex nA IIC T4 Gc
II 3 D Ex tc IIIC T 85°C Dc
IECEx:
Ex nA IIC T4 Gc
Ex tc IIIC T 85°C Dc
KOSHA:
Ex nA IIC T4
Ex tc IIIC T85°C Dc
符合環(huán)保要求
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
大小Large